橋式三坐標
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ZEISS SPECTRUM II
蔡司技術的入門級水平，測量范圍 可達10/16/6 E0自1.9 μm起...
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ZEISS NEW CONTURA
蔡司測量范圍 可達12/24/10 E0自1.5 μm起...
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ZEISS ACCURA
測量范圍[dm]可達20/42/15 E0自1.2 μm起...
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ZEISS MICURA
測量范圍[dm] 5/5/5 E0 = 0.7 μm...
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ZEISS PRISMO navigator
ZEISS計量型三坐標，測量范圍[dm] 可達16/42/10 E0自0.5 μm起...
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ZEISS XENOS
測量范圍[dm] 9/15/7 E0 = 0.3 μm...